personnel profile

Research Statement

Kenny's group is researching fundamental issues and applications of micromechanical structures. These devices are usually fabricated from silicon wafers using integrated circuit fabrication tools. Using these techniques, the group builds sensitive accelerometers, infrared detectors, and force-sensing cantilevers. This research has many applications, including integrated packaging, inertial navigation, fundamental force measurements, experiments on bio-molecules, device cooling, bio-analytical instruments, and small robots. Because this research field is multidisciplinary in nature, work in this group is characterized by strong collaborations with other departments, as well as with local industry.

Degree	Discipline	Year	School
PhD	Physics	1989	UC Berkeley

Publication Title	Author(s)/Speaker(s)	Open Document
Encapsulated submillimeter piezoresistive accelerometers	Kenny, TW, et. al.
Phase change phenomena in silicon microchannels	Kenny, TW, et. al.
Title: Encapsulated submillimeter piezoresistive accelerometers Author(s): Kenny, TW, et. al. Journal: Journal of Microelectromechanical Systems Date Published: 2006-6 [Close Box] Title: Phase change phenomena in silicon microchannels Author(s): Kenny, TW, et. al. Journal: International Journal of Heat and Mass Transfer Date Published: 2005-4 [Close Box]
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Academic Honors & Awards

Robert Bosch Faculty Scholar
NSF CAREER Award (1995-1999)
Terman Fellowship (1995-1998)
Captain, Ultimate Frisbee Coed National Champions (RFBF), 1998
Captain, Ultimate Frisbee Coed World Champions (RFBF), 1999