Faculty & Research

personnel profile

Krishna Saraswat

 
Title:Professor; Rickey/Nielsen Professorship in the School of Engineering
Department(s):Electrical Engineering, Materials Science and Engineering by courtesy
Location:Allen 327X
Mail Code:4075
Phone:650.725.3610       
Fax:650.723.4659
E-mail: saraswat@stanford.edu
URL: http://cis.stanford.edu/~saraswat/
Administrator: Gail D. Chun-Creech

Research Statement

Saraswat is working on a variety of problems related to new and innovative materials, structures, and process technology of silicon and germanium devices and interconnects for nanoelectronics. Special areas of his interest are: new device structures for scaling MOS transistors to the nanometer regime, 3-D ICs with multiple layers of heterogeneous devices, metal and optical interconnections, ultrathin MOS gate dielectrics, development of tools and methodology for simulation and control of etching, deposition and rapid thermal process technologies, and environmentally benign manufacturing.

Degree Discipline Year School
PhD 1974 Stanford
Publication TitleAuthor(s)/Speaker(s)Open Document
Ge based high performance nanoscale MOSFETs Saraswat, KC, et. al.
Fabrication of high-quality p-MOSFET in Ge grown heteroepitaxially on Si Saraswat, KC, et. al.
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Academic Honors & Awards

2004 Andrew S. Grove Award, IEEE
Rickey/Nielsen Professor in the School of Engineering
2000 Thomas Callinan Award,The Electrochemical Society
1989 Fellow, IEEE